By Theodor Schneller (auth.), Theodor Schneller, Rainer Waser, Marija Kosec, David Payne (eds.)
This is the 1st textual content to hide all facets of answer processed useful oxide thin-films. Chemical answer Deposition (CSD) contains all answer dependent skinny- movie deposition innovations, which contain chemical reactions of precursors in the course of the formation of the oxide motion pictures, i. e. sol-gel kind routes, metallo-organic decomposition routes, hybrid routes, and so forth. whereas the improvement of sol-gel style approaches for optical coatings on glass via silicon dioxide and titanium dioxide dates from the mid-20th century, the 1st CSD derived digital oxide skinny motion pictures, similar to lead zirconate titanate, have been ready within the 1980’s. for the reason that then CSD has emerged as a hugely versatile and low-budget approach for the fabrication of a truly good selection of practical oxide skinny motion pictures. program parts comprise, for instance, built-in dielectric capacitors, ferroelectric random entry thoughts, pyroelectric infrared detectors, piezoelectric micro-electromechanical platforms, antireflective coatings, optical filters, conducting-, obvious conducting-, and superconducting layers, luminescent coatings, fuel sensors, skinny movie solid-oxide gas cells, and photoelectrocatalytic sun cells. within the appendix specific “cooking recipes” for chosen fabric structures are offered.
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Extra info for Chemical Solution Deposition of Functional Oxide Thin Films
Hoebbel D, Reinert T, Schmidt H, Arpac E (1997) On the hydrolytic stability of organic ligands in Al-, Ti- and Zr-alkoxide complexes. J Sol-Gel Sci Technol 10:115–126 8. Glaubitt W, Sporn D, Jahn R (1994) A new way to spinnable sols derived from modified aluminumalkoxides. J Sol-Gel Sci Technol 2:525–528 9. Fric H, Kogler FR, Puchberger M, Schubert U (2004) Structural chemistry of titanium alkoxides substituted by the chelating bidentate ligands isoeugenolate or 2-aminoethanolate. Z Naturforsch 59b:1241–1245 10.
107]. 1. Direct esterification within the initially formed substitution product via a template effect, known from homogeneous catalysis. 2. Esterification in the reaction solution according to the following equation: CH3 COOH þ ROH ! 7) The required free acid may stem from a certain dynamic exchange between acetic acid bound to the titanium atom and released to the solution in case of the equimolar reaction mixture. If acid to Ti alkoxide ratios are larger than 1, unreacted free acid may be directly available in the solution.
This structure is similar to Fig. 2f and can be represented by a replacement of the “OR--H–L” group by the “O-CR-O” group of the carboxylate. However this simple exchange product normally cannot be isolated. Instead further reactions lead to the formation of carboxylato-coordinated oxido/alkoxido clusters of the generalized formula Tia(O)b(OR)c(OOCR0 )d . If the very frequently used Ti(OiPr)4 and Ti(OnBu)4 compounds are reacted with HOAc, typically hexameric clusters (a ¼ 6, b ¼ 4, c ¼ 12 or 8, d ¼ 4 or 8) could be prepared as single crystals and structurally characterized by X-ray diffraction [104, 108].
Chemical Solution Deposition of Functional Oxide Thin Films by Theodor Schneller (auth.), Theodor Schneller, Rainer Waser, Marija Kosec, David Payne (eds.)