By T. E. G. Daenen, D. L. De Kubber (auth.), Yves Pauleau (eds.)

ISBN-10: 1402005253

ISBN-13: 9781402005251

ISBN-10: 940100353X

ISBN-13: 9789401003537

An up to date selection of instructional papers at the most up-to-date advances within the deposition and development of skinny movies for micro and nano applied sciences. The emphasis is on primary elements, rules and purposes of deposition suggestions used for the fabrication of micro and nano units. The deposition of skinny motion pictures is defined, emphasising the fuel section and floor chemistry and its results at the progress charges and houses of flicks. Gas-phase phenomena, floor chemistry, progress mechanisms and the modelling of deposition strategies are completely defined and mentioned to supply a transparent realizing of the expansion of skinny movies and microstructures through thermally activated, laser brought on, photon assisted, ion beam assisted, and plasma more desirable vapour deposition processes.

A guide for engineers and scientists and an advent for college kids of microelectronics.

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Additional info for Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

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As a layer of polyelectrolyte adsorm to a charged surface, the overcompensated charge (see below) is balanced by the presence of counterions. The charge compensation of the adsorbed layer obeys the model of the electrical double layer with specifically adsorbed ions (that have I~t all or part of their hydration sheath) localized at the inner Helmholtz plane (IHP) or Stern layer and non-specifically adsorbed ions (totally solvated) involving long-range electrostatic forces and localized at the outer Helmholtz plane (OHP).

18. 19. 20. 21. 22. 23. 24. 25. 26. 27. 28. 29. 30. 31. 32. 33. 34. 35. 36. 37. R. (1980) Electrochemical Methods, John Wiley & Sons, p506. L. (1998) Adsorption and desorption kinetics of polyelectrolytes on planar surfaces, Langmuir 14, 1162-1176. F. (2000) Counterion release and electrostatic adsorption, Phys. Rev. Lett. 84,4862-4865. S. (1998) Metastable-equilibrium adsorption theory I. Iheoretical, J. Coli. Inter[. Sci. 201,7176. L. (1998) Adsorption and heat of adsorption onto polymer particular surface by inverse gas chromatography, J.

Soc. D. (1998) Self-assembly of single electron transistors and related devices, Chem. Soc. Rev. 27, I. KONUMA Max-Planck-Institut fur Festkorperforschung Heisenbergstrasse I, D-70569 Stuttgart, Germany 1. Introduction Liquid phase epitaxy (LPE) has been applied for growing mainly semiconductor materials [I, 2]. It may be required, when electrical and crystallographic quality of wafers which are cut from bulk crystals is not good enough for making active devices directly on wafers, to grow same materials as substrates but better quality on wafers (homoepitaxy).

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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies by T. E. G. Daenen, D. L. De Kubber (auth.), Yves Pauleau (eds.)


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